MEMS

This book brings together groundbreaking research in MEMS technology and explores a wide range of novel applications enabled by the technology. International experts from industry and academia explain the theoretical background and share insights on applying the technology. Covering the historical evolution and recent trends, they examine gyroscopes, ambient energy harvesting, interconnects, resonators, micro hot-plate devices, wearable sensor assemblies, wireless microactuators, and much more. Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for further research and new applications.