The Physical Properties of Thin Metal Films

Thin films of conducting materials, such as metals, alloys and semiconductors, are used in many areas of science and technology, particularly in modern integrated circuit microelectronics that require high quality thin films for the manufacture of connection layers, resistors, and ohmic contacts. Physical Properties of Thin Metal Films provides a clear presentation of the complex physical properties particular to thin conducting films and includes the necessary theory, confirming experiments, and applications. This book will be an invaluable reference for graduate students, engineers, and scientists working in the electronics industry and fields of pure and applied science.