Microoptics and Nanooptics Fabrication

Advancements in micro/nanooptical fabrication technologies have led to the next generation of optical components. Microoptics and Nanooptics Fabrication explores this vital relationship, detailing fabrication processes as they affect a micro or nanooptical component's intended performance. Various contributors examine topics such as surface relief diffractive optical elements, solar cell microoptics, gray-scale refractive microoptics, digital and analog mask properties, microoptics replication, ion exchange optics, semiconductor waveguides, optical MEMS, and as two- and three-dimensional photonic crystals.